Valve Manifold Boxes (VMBS)

Valve Manifold Boxes (VMBS)

Ultra-High Purity Gas Mixing Systems

Designed to precisely control the distribution of process gases to semiconductor tools, Carten VMBS lower the gas pressures to provide split gas lines and precise pressure measurement while providing a safe, single point for safety shutdown functionality.

Valve Manifold Boxes VMBS

Key Features

Safe, vented enclosures made to specification

FAT/ Validation to ensure plug & play supply

Components manufactured and integration (welding, cleanroom assembly etc) completed on site

Complete ownership of component and assembly for servicing / information requests

Typical Applications

Pressure stage-down from semiconductor gas cabinets and gas panels at semiconductor FABS, controlling the distribution of process gases to multiple semiconductor tools, lowering of gas pressures, controlled split gas lines to separate semiconductor equipment tools, single point for safety shutdown, application containment functionality.

Key Specifications

Materials of Construction Cleanliness Specifications Options

316L stainless wetted area

Manufactured in Class 10 Cleanroom

Leak tested using Mass spectrometer <1x10(-9) mbar.l/s

Seismic-proof, and specific enclosure gas exhaust designs

UHP tubing and fittings

Zero particles @0.1µm

<10Ra micro-inch surface roughness

Carten or third-party components, MFC calibration

Component barstock-only source

<10ppb O2/H20 outgassing

Vacuum and pressure tested 100% production control

Full FAT, basic mechanical assembly

PCTFE standard seat (minimal volume)

Cleaned using 18.2MΩ·cm DI water

100p.s.i. operating pressure

Single or double-melt components