Valve Manifold Boxes (VMBS)
Ultra-High Purity Gas Mixing Systems
Designed to precisely control the distribution of process gases to semiconductor tools, Carten VMBS lower the gas pressures to provide split gas lines and precise pressure measurement while providing a safe, single point for safety shutdown functionality.
Key Features
Safe, vented enclosures made to specification
FAT/ Validation to ensure plug & play supply
Components manufactured and integration (welding, cleanroom assembly etc) completed on site
Complete ownership of component and assembly for servicing / information requests
Typical Applications
Pressure stage-down from semiconductor gas cabinets and gas panels at semiconductor FABS, controlling the distribution of process gases to multiple semiconductor tools, lowering of gas pressures, controlled split gas lines to separate semiconductor equipment tools, single point for safety shutdown, application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless wetted area |
Valves used in assembly manufactured in ISO Class 4 Cleanroom |
100% leak tested using mass spectrometer to 1x10-9 scc/s under vacuum |
Seismic-proof, and specific enclosure gas exhaust designs |
| UHP tubing and fittings |
Zero particles @0.1µm in static conditions |
<10Ra micro-inch surface roughness |
Carten or third-party components, MFC calibration |
| Component barstock-only source |
<10ppb O2/H20 outgassing |
375 PSI Max operating pressure |
Full FAT, basic mechanical assembly |
| PCTFE standard seat (minimal volume) |
Cleaned using DI water & oven baked |
Single or double-melt components |