UPC / DPC Series

UPC / DPC Series

Ultra-High Purity TEE Block Diaphragm Valves

Utilises all SPDS parts and advantages of the No.1 diaphragm valve for semiconductor applications, combined with the lowest dead space within any UHP valve on the market.


Key Features

Available in line sizes up to 6” main / 1” branch

Metal-to-metal external seals

Minimal dead space

Standard & bespoke multiport / block options

Typical Applications

Lateral inline points-of-connection (POC), ultra-high-purity gas control for point-of-use service, zero dead space bulk gas tee-off, UHP gas sampling, and critical application containment functionality.

Key Specifications

Materials of Construction Cleanliness Specifications Options

316L stainless body

Manufactured in Class 10 Cleanroom

Leak tested using Mass spectrometer <1x10(-9) mbar.l/s

Manual or pneumatic, LOTO failsafe configurations

Elgiloy Diaphragm

Zero particles @0.1µm

<10Ra micro-inch surface roughness

PFA / PI seat high temperature (up to 150C)

Barstock-only source

<10ppb O2/H20 outgassing

Vacuum and pressure tested 100% production control

Multiple block orientations and configurations (DPV etc)

PCTFE standard seat (minimal volume)

Cleaned using 18.2MΩ·cm DI water

Manual 375p.s.i. Pneumatic 250p.s.i.

2.5 - 9.0 Cv (flow coefficient)

View Data Sheet

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