UPC / DPC Series
Ultra-High Purity TEE Block Diaphragm Valves
Utilises all SPDS parts and advantages of our diaphragm valve for semiconductor applications, combined with the low dead space design
Key Features
Available in line sizes up to 6” main / 1” branch
Metal-to-metal external seals
Minimal dead space
Standard & bespoke multiport / block options
Typical Applications
Lateral inline points-of-connection (POC), ultra-high-purity gas control for point-of-use service, zero dead space bulk gas tee-off, UHP gas sampling, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless body |
Manufactured in ISO Class 4 Cleanroom |
100% leak tested using mass spectrometer to 1x10^-9 scc/s under vacuum and 1x10^-6 scc/s under pressure |
Manual or pneumatic, LOTO failsafe configurations |
| Elgiloy Diaphragm |
Zero particles @0.1µm in static conditions |
<10Ra micro-inch surface roughness |
PFA / PI seat high temperature (up to 150C) |
| Barstock-only source |
<10ppb O2/H20 outgassing |
Manual 375 PSI Max - Pneumatic 250 PSI Max |
Multiple block orientations and configurations (DPV etc) |
| PCTFE standard seat (minimal volume) |
Cleaned using DI water & oven baked |
2.5 - 9.0 Cv (flow coefficient) |