UBC / DBC Series
Ultra-High Purity TEE Block Bellows Valves
Utilises all HB parts and advantages of the standard UHP bellows valve for semiconductor applications, combined with the lowest dead space within any UHP globe valve on the market.
Key Features
Available in line sizes up to 4” main / 1 ½” branch
Metal-to-metal external seals
Minimal dead space
Multi-ply bellow construction for high durability
Typical Applications
Lateral inline points-of-connection (POC), ultra-high-purity gas control for point-of-use service, zero dead space bulk gas tee-off, UHP gas sampling, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless body |
Manufactured in ISO Class 4 Cleanroom |
100% leak tested using mass spectrometer to 1×10⁻⁹ scc/s under vacuum and 1x10-6 scc/s under pressure |
Manual or pneumatic |
| 316Ti bellows |
Zero particles @0.1µm in static conditions |
<10Ra micro-inch surface roughness |
PI seat high temperature (up to 150C) |
| Barstock-only source |
<10ppb O2/H20 outgassing |
375 PSI Max operating pressure |
Multiple block orientations and configurations (DBV etc) |
| PCTFE standard seat (minimal volume) |
Cleaned using DI water & oven baked |
10.2 – 16.6 Cv (flow coefficient) |