SPDS Series

Ultra-High Purity Diaphragm Valves

The No.1 UHP diaphragm valve-of-choice for semiconductor applications allows the highest flow rates (Cv) in the industry.


Key Features

Available in line sizes up to 1”

Metal-to-metal external seals

Pneumatic or manual interchangeability

Standard & bespoke multiport / block options

Typical Applications

Lateral points-of-connection (POC), tool hook-up shut-off, ultra-high-purity gas control for point-of-use service, valve manifold boxes (VMB), gas distribution panels, gas sticks, and critical application containment functionality.

Key Specifications

Materials of Construction Cleanliness Specifications Options

316L stainless body

Manufactured in Class 10 Cleanroom

Leak tested using Mass spectrometer <1x10(-9) mbar.l/s

Manual or pneumatic, LOTO failsafe configurations

Elgiloy Diaphragm

Zero particles @0.1µm

<10Ra micro-inch surface roughness

PFA / PI seat high temperature (up to 150C)

Barstock-only source

<10ppb O2/H20 outgassing

Vacuum and pressure tested 100% production control

4/20mA switching / signalling automation (pneumatic only)

PCTFE standard seat (minimal volume)

Cleaned using 18.2MΩ·cm DI water

Manual 375p.s.i. Pneumatic 250p.s.i.

0.41 - 9.0 Cv (flow coefficient)

View Data Sheet

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