SPDS Series
Ultra-High Purity Diaphragm Valves
The UHP diaphragm valve-of-choice for semiconductor applications allows the highest flow rates (Cv) in the industry.
Key Features
Available in line sizes up to 1”
Metal-to-metal external seals
Pneumatic or manual interchangeability
Standard & bespoke multiport / block options
Typical Applications
Lateral points-of-connection (POC), tool hook-up shut-off, ultra-high-purity gas control for point-of-use service, valve manifold boxes (VMB), gas distribution panels, gas sticks, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless body |
Manufactured in ISO Class 4 Cleanroom |
100% leak tested using mass spectrometer to 1x10^-9 scc/s under vacuum and 1x10^-6 scc/s under pressure |
Manual or pneumatic, LOTO failsafe configurations |
| Elgiloy Diaphragm |
Zero particles @0.1µm in static conditions |
<10Ra micro-inch surface roughness |
PFA / PI seat high temperature (up to 150°C) |
| Barstock-only source |
<10ppb O2/H20 outgassing |
Manual 375 PSI Max - Pneumatic 250 Psi Max |
Position Sensing (Pneumatic only) |
| PCTFE standard seat (minimal volume) |
Cleaned using DI water & oven baked |
0.41 - 9.0 Cv (flow coefficient) |
Solenoid Actuation (Pneumatic only) |