RG Regulators Series

RG Regulator Series

Ultra-High Purity Regulators

Carten regulators now used with every equipment manufacturer and chipmaker in the world, available in multiple flow rate and pressure ranges for all gas types

Regulator

Key Features

Available in line sizes up to 1”

Metal-to-metal external seals

Multiple inlet and outlet pressure ranges

Meets all hysteresis and droop standards

Typical Applications

High performance and precise pressure control in point-of-use and medium flow gas systems, gas-mixing systems, valve manifold boxes (VMB), gas mixing panels, high durability vacuum service, tool hook-up pressure control and stage-down, ultra-high-purity gas control for point-of-use service, gas sticks, and critical application containment functionality.

Key Specifications

Materials of Construction Cleanliness Specifications Options

316L stainless body

Manufactured in Class 10 Cleanroom

Leak tested using Mass spectrometer <1x10(-9) mbar.l/s

Gauges – upstream, downstream

316L poppet and components

Zero particles @0.1µm

<10Ra micro-inch surface roughness

PFA / PI seat high temperature

Bar 316L material

<10ppb O2/H20 outgassing

Vacuum and pressure tested 100% production control

Multiple inlet and outlet pressure ranges

PCTFE standard seat (minimal volume)

Cleaned using 18.2MΩ·cm DI water

375p.s.i. operating pressure

Multiple inlet and outlet flow rate ranges