RG Regulator Series
Ultra-High Purity Regulators
Carten regulators now used with every equipment manufacturer and chipmaker in the world, available in multiple flow rate and pressure ranges for all gas types
Key Features
Available in multiple outlet pressure ranges (1–250 PSIG)
outlet pressure ranges (1–250 PSIG)High pressure capability up to 3500 PSIG inlet
Ultra-low leak performance (≤1 × 10⁻⁹ scc/s He)
Electropolished internal surfaces for high purity applications
Typical Applications
High performance and precise pressure control in point-of-use and medium flow gas systems, gas-mixing systems, valve manifold boxes (VMB), gas mixing panels, high durability vacuum service, tool hook-up pressure control and stage-down, ultra-high-purity gas control for point-of-use service, gas sticks, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L Stainless Steel body standard |
≤10 Ra or 5 Ra micro-inch surface finish |
Max inlet pressure: 3500 - 150 PSI (series dependent) |
End connections (Tube, NPT, VCR, compression, etc.) |
| Hastelloy C-22 diaphragm |
Electropolished Ultra-high purity compatible |
Design pressure: 150% of max rated pressure |
Alternative internal materials (Hastelloy / Inconel) |
| PCTFE, PI, PFA seat (series dependent) |
Leak rate: 1×10⁻⁹ scc/s He |
Double melt 316L body material |
|
| 316L interals (depdning on configuration) |
Temp range: -26°C to +177°C |
Multiple pressure configurations |
|
| 0.06-8 Cv (flow coefficent) |
EP or BA grade |
||
| Inlet / Outlet gauges |