RG Regulator Series
Ultra-High Purity Regulators
Carten regulators now used with every equipment manufacturer and chipmaker in the world, available in multiple flow rate and pressure ranges for all gas types
Key Features
Available in line sizes up to 1”
Metal-to-metal external seals
Multiple inlet and outlet pressure ranges
Meets all hysteresis and droop standards
Typical Applications
High performance and precise pressure control in point-of-use and medium flow gas systems, gas-mixing systems, valve manifold boxes (VMB), gas mixing panels, high durability vacuum service, tool hook-up pressure control and stage-down, ultra-high-purity gas control for point-of-use service, gas sticks, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless body |
Manufactured in Class 100 Cleanroom |
Leak tested using Mass spectrometer <1x10(-9) mbar.l/s |
Gauges – upstream, downstream |
| 316L poppet and components |
Zero particles @0.1µm |
<10Ra micro-inch surface roughness |
PFA / PI seat high temperature |
| Bar 316L material |
<10ppb O2/H20 outgassing |
Vacuum and pressure tested 100% production control |
Multiple inlet and outlet pressure ranges |
| PCTFE standard seat (minimal volume) |
Cleaned using 18.2MΩ·cm DI water |
250p.s.i. operating pressure |
Multiple inlet and outlet flow rate ranges |