HFC Series
Ultra-High Purity High Flow Bellows Valves
UHP cast bellows globe valve for semiconductor applications utilising our market-leading HF series bellows, offering a balanced selection based on cost and flow rates.
Key Features
Available in line sizes up to 6”
Metal-to-metal external seals
High Cv (flow coefficient)
Multi-ply bellow construction for high durability
Typical Applications
High flow bulk gas distribution (BGD), lateral end-of-line (EOL) shut-off, high flow ultra-high-purity gas control for filtration and purification, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L Cast stainless body |
Manufactured in ISO Class 4 Cleanroom |
100% leak tested using mass spectrometer to 1x10^-9 scc/s under vacuum and 1x10^-6 scc/s under pressure |
Manual or pneumatic |
| 316Ti bellows up sizes to 1.5", Inconel 625 for above |
Zero particles @0.1µm in static conditions |
<10Ra micro-inch surface roughness |
PI seat high temperature (up to 150°C) |
| PCTFE standard seat (minimal volume) |
<10ppb O2/H20 outgassing |
Manual 375 PSI Max - Pneumatic 250 PSI Max |
Position Sensing (Pneumatic only) |
| Cleaned using DI water & oven baked |
5 - 900 Cv (flow coefficient) |
Solenoid Actuation (Pneumatic only) |