HFC Series

Ultra-High Purity High Flow Bellows Valves

UHP cast bellows globe valve for semiconductor applications utilising our market-leading HF series bellows, offering a balanced selection based on cost and flow rates.


Key Features

Available in line sizes up to 8”

Metal-to-metal external seals

High Cv (flow coefficient)

Multi-ply bellow construction for high durability

Typical Applications

High flow bulk gas distribution (BGD), lateral end-of-line (EOL) shut-off, high flow ultra-high-purity gas control for filtration and purification, and critical application containment functionality.

Key Specifications

Materials of Construction Cleanliness Specifications Options

316L Cast stainless body

Manufactured in Class 10 Cleanroom

Leak tested using Mass spectrometer <1x10(-9) mbar.l/s

Manual or pneumatic

Bellows Inconel 625 or 316Ti

Zero particles @0.1µm

<10Ra micro-inch surface roughness

PFA / PI seat high temperature (up to 150C)

Visual Indicators options available

<10ppb O2/H20 outgassing

Vacuum and pressure tested 100% production control

4/20mA switching / signalling automation

PCTFE standard seat (minimal volume)

Cleaned using 18.2MΩ·cm DI water

Manual 375p.s.i. Pneumatic 250p.s.i.

5 - 2350 Cv (flow coefficient)

View Data Sheet

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