HFC Series
Ultra-High Purity High Flow Bellows Valves
UHP cast bellows globe valve for semiconductor applications utilising our market-leading HF series bellows, offering a balanced selection based on cost and flow rates.
Key Features
Available in line sizes up to 8”
Metal-to-metal external seals
High Cv (flow coefficient)
Multi-ply bellow construction for high durability
Typical Applications
High flow bulk gas distribution (BGD), lateral end-of-line (EOL) shut-off, high flow ultra-high-purity gas control for filtration and purification, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L Cast stainless body |
Manufactured in Class 10 Cleanroom |
Leak tested using Mass spectrometer <1x10(-9) mbar.l/s |
Manual or pneumatic |
| Bellows Inconel 625 or 316Ti |
Zero particles @0.1µm |
<10Ra micro-inch surface roughness |
PFA / PI seat high temperature (up to 150C) |
| Visual Indicators options available |
<10ppb O2/H20 outgassing |
Vacuum and pressure tested 100% production control |
4/20mA switching / signalling automation |
| PCTFE standard seat (minimal volume) |
Cleaned using 18.2MΩ·cm DI water |
Manual 375p.s.i. Pneumatic 250p.s.i. |
5 - 2350 Cv (flow coefficient) |