HF / HFA

HF Series

Ultra-High Purity High Flow Bellows Valves

UHP bellows globe valve for semiconductor applications containing all the advantages of our HB standard series, with extended valve stroke to deliver the highest flow rates, with minimum pressure drop, in the semiconductor industry.

HF HFA

Key Features

Available in line sizes up to 12”

Metal-to-metal external seals

Highest Cv (flow coefficient) in semiconductor industry

Multi-ply bellow construction for high durability

Typical Applications

High flow bulk gas distribution (BGD), lateral end-of-line (EOL) shut-off, high flow ultra-high-purity gas control for filtration and purification, and critical application containment functionality.

Key Specifications

Materials of Construction Cleanliness Specifications Options

316L stainless body

Manufactured in Class 10 Cleanroom

Leak tested using Mass spectrometer <1x10(-9) mbar.l/s

Manual or pneumatic

Inconel625 bellows

Zero particles @0.1µm

<10Ra micro-inch surface roughness

PFA / PI seat high temperature (up to 150C)

Barstock-only source

<10ppb O2/H20 outgassing

Vacuum and pressure tested 100% production control

4/20mA switching / signalling automation

PCTFE standard seat (minimal volume)

Cleaned using 18.2MΩ·cm DI water

375p.s.i. operating pressure

5 - 2000 Cv (flow coefficient)