HF Series
Ultra-High Purity High Flow Bellows Valves
UHP bellows globe valve for semiconductor applications containing all the advantages of our HB standard series, with extended valve stroke to deliver the highest flow rates, with minimum pressure drop, in the semiconductor industry.
Key Features
Available in line sizes up to 6”
Metal-to-metal external seals
Highest Cv (flow coefficient) in semiconductor industry
Multi-ply bellow construction for high durability
Typical Applications
High flow bulk gas distribution (BGD), lateral end-of-line (EOL) shut-off, high flow ultra-high-purity gas control for filtration and purification, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless body |
Manufactured in ISO Class 4 Cleanroom |
100% leak tested using mass spectrometer to 1×10⁻⁹ scc/s under vacuum and 1x10-6 scc/s under pressure |
Manual or pneumatic |
| 316Ti bellows up sizes to 1", Inconel 625 for above |
Zero particles @0.1µm in static conditions |
<10Ra micro-inch surface roughness |
PI seat high temperature (up to 150°C) |
| Barstock-only source |
<10ppb O2/H20 outgassing |
Manual 375 PSI Max - Pneumatic 250 PSI Max |
Position Sensing (Pneumatic only) |
| PCTFE standard seat (minimal volume) |
Cleaned using DI water & oven baked |
5 - 758 Cv (flow coefficient) |
Solenoid Actuation (Pneumatic only) |