HB Series
Ultra-High Purity Bellows Valves
The only UHP bellows globe valve for semiconductor applications with metal-to-metal external seals ensuring the high levels of containment, purity, and cleanliness required over a full FAB life cycle.
Key Features
Available in line sizes up to 6”
Metal-to-metal external seals
Pneumatic or manual interchangeability
Multi-ply bellow construction for high durability
Typical Applications
Bulk gas distribution (BGD), lateral end-of-line (EOL) shut-off, ultra-high-purity gas control for filtration and purification, high flow shut-off and distribution for valve manifold boxes (VMB), and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless body |
Manufactured in ISO Class 4 Cleanroom |
100% leak tested using mass spectrometer to 1×10⁻⁹ scc/s under vacuum and 1x10-6 scc/s under pressure |
Manual or pneumatic |
| 316Ti bellows |
Zero particles @0.1µm in static conditions |
<10Ra micro-inch surface roughness |
PI seat high temperature (up to 150°C) |
| Barstock-only source |
<10ppb O2/H20 outgassing |
Manual 375 PSI Max - Pneumatic 250 PSI Max |
Position Sensing (Pneumatic only) |
| PCTFE standard seat (minimal volume) |
Cleaned using DI water & oven baked |
1.93 (GB series) - 185 Cv (flow coefficient) |
Solenoid Actuation (Pneumatic only) |