HB Series

Ultra-High Purity Bellows Valves

The only UHP bellows globe valve for semiconductor applications with metal-to-metal external seals ensuring the high levels of containment, purity, and cleanliness required over a full FAB life cycle.


Key Features

Available in line sizes up to 6”

Metal-to-metal external seals

Pneumatic or manual interchangeability

Multi-ply bellow construction for high durability

Typical Applications

Bulk gas distribution (BGD), lateral end-of-line (EOL) shut-off, ultra-high-purity gas control for filtration and purification, high flow shut-off and distribution for valve manifold boxes (VMB), and critical application containment functionality.

Key Specifications

Materials of Construction Cleanliness Specifications Options

316L stainless body

Manufactured in Class 10 Cleanroom

Leak tested using Mass spectrometer <1x10(-9) mbar.l/s

Manual or pneumatic

Inconel625 bellows

Zero particles @0.1µm

<10Ra micro-inch surface roughness

PFA / PI seat high temperature (up to 150C)

Barstock-only source

<10ppb O2/H20 outgassing

Vacuum and pressure tested 100% production control

4/20mA switching / signalling automation (pneumatic only)

PCTFE standard seat (minimal volume)

Cleaned using 18.2MΩ·cm DI water

Manual 375p.s.i. Pneumatic 250p.s.i.

1.93 (GB series) - 185 Cv (flow coefficient)

View Data Sheet

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