Gas Mixing Systems

Gas Mixing Systems

Ultra-High Purity Gas Mixing Systems

Contract-manufactured modules / cabinets for stand-alone gas mixing systems to specified semiconductor equipment tool requirements, using all-Carten or specified third-party components, including both mechanical and electrical functionality, fully validated / FAT at Carten to provide turnkey product to customer.

Gas Mixing System

Key Features

Smallest footprint possible from P&ID

FAT/ Validation to ensure plug & play supply

Components manufactured and integration (welding, cleanroom assembly etc) completed on site

Complete ownership of component and assembly for servicing / information requests

Typical Applications

Precise gas mixing, ultra-high-purity gas control, gas control for ALD, CVD, MOCVD, Lithography, and critical application containment functionality.

Key Specifications

Materials of Construction Cleanliness Specifications Options

316L stainless wetted area

Manufactured in Class 10 Cleanroom

Leak tested using Mass spectrometer <1x10(-9) mbar.l/s

Seismic-proof, and specific enclosure gas exhaust designs

UHP tubing and fittings

Zero particles @0.1µm

<10Ra micro-inch surface roughness

Carten or third-party components, MFC calibration

Component barstock-only source

<10ppb O2/H20 outgassing

Vacuum and pressure tested 100% production control

Full FAT, basic mechanical assembly

PCTFE standard seat (minimal volume)

Cleaned using 18.2MΩ·cm DI water

100p.s.i. operating pressure

Single or double-melt components