Gas Mixing Systems
Ultra-High Purity Gas Mixing Systems
Contract-manufactured modules / cabinets for stand-alone gas mixing systems to specified semiconductor equipment tool requirements, using all-Carten or specified third-party components, including both mechanical and electrical functionality, fully validated / FAT at Carten to provide turnkey product to customer.
Key Features
Smallest footprint possible from P&ID
FAT/ Validation to ensure plug & play supply
Components manufactured and integration (welding, cleanroom assembly etc) completed on site
Complete ownership of component and assembly for servicing / information requests
Typical Applications
Precise gas mixing, ultra-high-purity gas control, gas control for ALD, CVD, MOCVD, Lithography, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless wetted area |
Valves used in assembly manufactured in ISO Class 4 Cleanroom |
100% leak tested using mass spectrometer to 1x10^-9 scc/s under vacuum |
Seismic-proof, and specific enclosure gas exhaust designs |
| UHP tubing and fittings |
Zero particles @0.1µm in static conditions |
<10Ra micro-inch surface roughness |
Carten or third-party components, MFC calibration |
| Component barstock-only source |
<10ppb O2/H20 outgassing |
Full FAT, basic mechanical assembly |
|
| Cleaned using DI water & oven-baked |
Single or double-melt components |