Gas Interface Panels (IP), Boxes (FIB)

Gas Interface Panels (IP), Boxes (FIB)

Ultra-High Purity Gas Interface Panels, Boxes

Contract-manufactured to specified semiconductor FAB requirements, Carten provide off-site manufacturing fully validated / FAT to provide turnkey product to customer.

Gas Interface Panel IP Box FIB

Key Features

Partnerships with EPC companies for install

FAT/ Validation to ensure plug & play supply

Components manufactured and integration (welding, cleanroom assembly etc) completed on site

Complete ownership of component and assembly for servicing / information requests

Typical Applications

Gas lines from interface component to tool, interface plates to tool, interface boxes bespoke design per FAB, full FAB coverage gas cabinet to equipment tool, and critical application containment functionality.

Key Specifications

Materials of Construction Cleanliness Specifications Options

316L stainless wetted area

Manufactured in Class 10 Cleanroom

Leak tested using Mass spectrometer <1x10(-9) mbar.l/s

Seismic-proof, and specific enclosure gas exhaust designs

UHP tubing and fittings

Zero particles @0.1µm

<10Ra micro-inch surface roughness

Carten or third-party components

Component barstock-only source

<10ppb O2/H20 outgassing

Vacuum and pressure tested 100% production control

Full FAT, basic mechanical assembly

PCTFE standard seat (minimal volume)

Cleaned using 18.2MΩ·cm DI water

100p.s.i. operating pressure

Single or double-melt components