Gas Interface Panels (IP), Boxes (FIB)
Ultra-High Purity Gas Interface Panels, Boxes
Contract-manufactured to specified semiconductor FAB requirements, Carten provide off-site manufacturing fully validated / FAT to provide turnkey product to customer.
Key Features
Partnerships with EPC companies for install
FAT/ Validation to ensure plug & play supply
Components manufactured and integration (welding, cleanroom assembly etc) completed on site
Complete ownership of component and assembly for servicing / information requests
Typical Applications
Gas lines from interface component to tool, interface plates to tool, interface boxes bespoke design per FAB, full FAB coverage gas cabinet to equipment tool, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless wetted area |
Manufactured in Class 10 Cleanroom |
Leak tested using Mass spectrometer <1x10(-9) mbar.l/s |
Seismic-proof, and specific enclosure gas exhaust designs |
| UHP tubing and fittings |
Zero particles @0.1µm |
<10Ra micro-inch surface roughness |
Carten or third-party components |
| Component barstock-only source |
<10ppb O2/H20 outgassing |
Vacuum and pressure tested 100% production control |
Full FAT, basic mechanical assembly |
| PCTFE standard seat (minimal volume) |
Cleaned using 18.2MΩ·cm DI water |
100p.s.i. operating pressure |
Single or double-melt components |