CMD Series

Ultra-High Purity Diaphragm Valves

The No.1 UHP dome diaphragm valve-of-choice for semiconductor applications requiring high durability and consistent operation, with a huge array of configuration and valve control options.


Key Features

Available in line sizes up to ½”

Metal-to-metal external seals

Pneumatic, multiturn or ¼- turn interchangeability

Standard & bespoke multiport / block options

Typical Applications

Gas-mixing systems, valve manifold boxes (VMB), gas mixing panels, high durability vacuum service, tool hook-up shut-off, ultra-high-purity gas control for point-of-use service, gas sticks, and critical application containment functionality.

Key Specifications

Materials of Construction Cleanliness Specifications Options

316L stainless body

Manufactured in Class 10 Cleanroom

Leak tested using Mass spectrometer <1x10(-9) mbar.l/s

Manual, pneumatic, or ¼ turn

Nickel-cobalt Diaphragm

Zero particles @0.1µm

<10Ra micro-inch surface roughness

PFA / PI seat high temperature (up to 150C)

Barstock-only source

<10ppb O2/H20 outgassing

Vacuum and pressure tested 100% production control

LOTO failsafe configurations

PCTFE standard seat (minimal volume)

Cleaned using 18.2MΩ·cm DI water

¼” pneumatic 150 PSI All other sizes are 250 PSI

0.3 – 0.7 Cv (flow coefficient)

View Data Sheet

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