CMD Series
Ultra-High Purity Diaphragm Valves
The dome diaphragm valve-of-choice for semiconductor applications requiring high durability and consistent operation, with a huge array of configuration and valve control options.
Key Features
Available in line sizes up to ½”
Metal-to-metal external seals
Pneumatic, multiturn or ¼- turn interchangeability
Standard & bespoke multiport / block options
Typical Applications
Gas-mixing systems, valve manifold boxes (VMB), gas mixing panels, high durability vacuum service, tool hook-up shut-off, ultra-high-purity gas control for point-of-use service, gas sticks, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless body |
Manufactured in ISO Class 4 Cleanroom |
100% leak tested using mass spectrometer to 1x10-9 scc/s under vacuum and 1x10-6 scc/s under pressure |
Manual, pneumatic, or ¼ turn |
| Nickel-cobalt Diaphragm |
Zero particles @0.1µm in static conditions |
<10Ra micro-inch surface roughness |
PFA / PI seat high temperature (up to 150°C) |
| Barstock-only source |
<10ppb O2/H20 outgassing |
¼” pneumatic 150 PSI Max - All other sizes are 250 PSI Max |
LOTO failsafe configurations |
| PCTFE standard seat (minimal volume) |
Cleaned using DI water & oven baked |
0.3 – 0.7 Cv (flow coefficient) |