CBV Series
Carten Ball Valves
Semiconductor standards applied to ball valves for the market, C/LOK connectivity and semiconductor grade processing and analysis ensures suitability for specified applications.
Key Features
Available in line sizes up to 6”
PTFE internal and external seals
Iso 5211 direct Mounting pad + Lockable handle As standard
Purge Connections Possible
Typical Applications
Vacuum exhaust, CFOS compatibility, low purity gas distribution, low purity laterals POC (low purity), shut-off functionality for gas distribution and high-volume abatement.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L CF3M Body Material |
Manufactured in Class 10 Cleanroom |
Leak tested using Mass spectrometer <1x10(-6) mbar.l/s |
Manual or pneumatic |
| PTFE Body seat |
30 Ra BA as standard |
<30Ra micro-inch surface roughness |
TFM 1600 internal / external seals for lower temp to -40°C |
| PTFE stem packing |
Cleaned using 18.2MΩ·cm DI water |
Pressure tested 100% production control |
Purge connections |
| 316 CF8M BALL |
Welded Tee For POC Connections (SCCBVT) |
||
| Sensors (pneumatic only) |