CB Series
Ultra-High Purity Check Valves
The only UHP inline check valve for semiconductor applications with metal-to-metal external seals preventing backflow and contamination risk, while ensuring the high levels of containment, purity, and cleanliness required over a full FAB life cycle.
Key Features
Available in line sizes up to 6”
Metal-to-metal external seals
Non-particle generating internal components
Low cracking pressure to open
Typical Applications
Bulk gas distribution (BGD), isolation and reverse flow prevention functionality for face interface boxes (FIBS) and interface plates (IP) required for tool hook-up, valve manifold boxes (VMB’s), and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless body |
Manufactured in Class 10 Cleanroom |
Leak tested using Mass spectrometer <1x10(-9) mbar.l/s |
Standard and high-flow spring |
| 316L stainless stem and spring |
Zero particles @0.1µm |
<10Ra micro-inch surface roughness |
Integrated purge connections for install |
| Barstock-only source |
<10ppb O2/H20 outgassing |
Reverse flow and pressure tested 100% production control |
Multiple seat material options |
| PCTFE standard seat (minimal volume) |
Cleaned using 18.2MΩ·cm DI water |
250p.s.i. operating pressure |
1.93 (GB series) – 165.5 Cv (flow coefficient) |