CB Series

Ultra-High Purity Check Valves

The only UHP inline check valve for semiconductor applications with metal-to-metal external seals preventing backflow and contamination risk, while ensuring the high levels of containment, purity, and cleanliness required over a full FAB life cycle.


Key Features

Available in line sizes up to 6”

Metal-to-metal external seals

Non-particle generating internal components

Low cracking pressure to open

Typical Applications

Bulk gas distribution (BGD), isolation and reverse flow prevention functionality for face interface boxes (FIBS) and interface plates (IP) required for tool hook-up, valve manifold boxes (VMB’s), and critical application containment functionality.

Key Specifications

Materials of Construction Cleanliness Specifications Options

316L stainless body

Manufactured in Class 10 Cleanroom

Leak tested using Mass spectrometer <1x10(-9) mbar.l/s

Standard and high-flow spring

316L stainless stem and spring

Zero particles @0.1µm

<10Ra micro-inch surface roughness

Integrated purge connections for install

Barstock-only source

<10ppb O2/H20 outgassing

Reverse flow and pressure tested 100% production control

Multiple seat material options

PCTFE standard seat (minimal volume)

Cleaned using 18.2MΩ·cm DI water

375p.s.i. operating pressure

1.93 (GB series) – 165.5 Cv (flow coefficient)

View Data Sheet

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