CB Series
Ultra-High Purity Check Valves
The UHP inline check valve for semiconductor applications with metal-to-metal external seals preventing backflow and contamination risk, while ensuring the high levels of containment, purity, and cleanliness required over a full FAB life cycle.
Key Features
Available in line sizes up to 4”
Metal-to-metal external seals
Low cracking pressure to open
Typical Applications
Bulk gas distribution (BGD), isolation and reverse flow prevention functionality for face interface boxes (FIBS) and interface plates (IP) required for tool hook-up, valve manifold boxes (VMB’s), and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless body and stem |
Manufactured in ISO Class 4 Cleanroom |
100% leak tested using mass spectrometer to 1×10⁻⁹ scc/s under vacuum and 1x10-6 scc/s under pressure |
Standard and high-flow spring |
| 302 stainless spring |
Zero particles @0.1µm in static conditions |
<10Ra micro-inch surface roughness |
Integrated purge connections for install |
| Barstock-only source |
<10ppb O2/H20 outgassing |
250 PSI Max operating pressure |
|
| VITON standard seat (minimal volume) with KEL-F guide |
Cleaned using DI water & oven baked |
1.93 (CVV series) – 165.5 Cv (flow coefficient) |