Bulk Gas Distribution Laterals / Spools
Ultra-High Purity Laterals
Low and ultra-high-purity options fully manufactured at Carten to ensure clean UHP gas transfer from bulk gas filtration through lateral POCS to semiconductor tools – can be supplied as an all-Carten assembly, or with specified third-party components.
Key Features
Available in line sizes up to 6”
UPC, DPC, SPDST, or Pulled TEE options
Low dead space design
Complete ownership of component and assembly for servicing / information requests
Typical Applications
Lateral inline points-of-connection (POC), ultra-high-purity gas control for point-of-use service, zero dead space bulk gas tee-off, UHP gas sampling, and critical application containment functionality.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless wetted area |
Valves used in assembly manufactured in ISO Class 4 Cleanroom |
100% leak tested using mass spectrometer to 1x10-9 scc/s under vacuum |
Manual or pneumatic, LOTO failsafe configurations |
| Elgiloy Diaphragm |
Zero particles @0.1µm in static conditions |
<10Ra micro-inch surface roughness |
PFA / PI seat high temperature (up to 150C) |
| Component barstock-only source |
<10ppb O2/H20 outgassing |
375 PSI Max operating pressure |
Multiple block orientations and configurations (DPV etc) |
| PCTFE standard seat (minimal volume) |
Cleaned using DI water & oven baked |
2.5 - 9.0 Cv (flow coefficient) |