Bulk Gas Distribution Laterals / Spools

Bulk Gas Distribution Laterals / Spools

Ultra-High Purity Laterals

Low and ultra-high-purity options fully manufactured at Carten to ensure clean UHP gas transfer from bulk gas filtration through lateral POCS to semiconductor tools – can be supplied as an all-Carten assembly, or with specified third-party components.

Bulk Gas Distribution Laterals Spools

Key Features

Available in line sizes up to 6”

UPC, DPC, SPDST, or Pulled TEE options

Lowest dead space design in industry

Complete ownership of component and assembly for servicing / information requests

Typical Applications

Lateral inline points-of-connection (POC), ultra-high-purity gas control for point-of-use service, zero dead space bulk gas tee-off, UHP gas sampling, and critical application containment functionality.

Key Specifications

Materials of Construction Cleanliness Specifications Options

316L stainless wetted area

Manufactured in Class 10 Cleanroom

Leak tested using Mass spectrometer <1x10(-9) mbar.l/s

Manual or pneumatic, LOTO failsafe configurations

Elgiloy Diaphragm

Zero particles @0.1µm

<10Ra micro-inch surface roughness

PFA / PI seat high temperature (up to 150C)

Component barstock-only source

<10ppb O2/H20 outgassing

Vacuum and pressure tested 100% production control

Multiple block orientations and configurations (DPV etc)

PCTFE standard seat (minimal volume)

Cleaned using 18.2MΩ·cm DI water

375p.s.i. operating pressure

2.5 - 9.0 Cv (flow coefficient)