2028 Series
Ultra-High Purity Vacuum Generator
The 2028 vacuum generator utilises venturi action, therefore ensuring no moving parts are in the wetted area of our signature series for the semiconductor market.
Key Features
Single or dual vacuum port options
Metal-to-metal internal and external seals
Standard face seal connection compatibility
1.6 scfm N2 at 60-80 PSIG to achieve 27in. Hg Vacuum.
Typical Applications
Primary vacuum generation in gas cabinets, chamber evacuation for semiconductor manufacturing, dilution of vented gases, and vacuum generation without the risk of contamination or particle generation.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless body and fittings |
Assembled in ISO Class 4 Cleanroom |
100% leak tested using mass spectrometer to 1×10⁻⁹ scc/s scc/s under vacuum |
Single or dual vacuum ports available |
| 316L Stainless Steel Removable Nozzels |
Cleaned using DI water & oven baked |
<10Ra micro-inch surface roughness |
Weld on tube extension |
| Barstock-only source |