2028 Series
Ultra-High Purity Vacuum Generator
The 2028 vacuum generator utilises venturi action, therefore ensuring no moving parts are in the wetted area of our signature series for the semiconductor market.
Key Features
Single or dual
vacuum port options
Metal-to-metal
internal and
external seals
Standard face seal
connection
compatibility
Typical Applications
Primary vacuum generation in gas cabinets, chamber evacuation for semiconductor manufacturing, dilution of vented gases, and vacuum generation without the risk of contamination or particle generation.
Key Specifications
| Materials of Construction | Cleanliness | Specifications | Options |
|---|---|---|---|
| 316L stainless body and fittings |
Manufactured in Class 10 Cleanroom |
Leak tested using Mass spectrometer <1x10(-9) mbar.l/s |
Single or dual ports available |
| 316L Stainless Steel Removable Nozzels |
Zero particles @0.1µm |
<10Ra micro-inch surface roughness |
Can be integrated system as VCR component replacement |
| Barstock-only source |
<10ppb O2/H20 outgassing |
60 - 80p.s.i. operating pressure |
|
| Cleaned using 18.2MΩ·cm DI water |