SPDS Series
Ultra-High Purity Diaphragm Valves
The No.1 UHP diaphragm valve-of-choice for semiconductor applications allows the highest flow rates (Cv) in the industry.
Key Features
Available in line sizes up to 1”
Metal-to-metal external seals
Pneumatic or manual interchangeability
Standard & bespoke multiport / block options
Typical Applications
Lateral points-of-connection (POC), tool hook-up shut-off, ultra-high-purity gas control for point-of-use service, valve manifold boxes (VMB), gas distribution panels, gas sticks, and critical application containment functionality.
Key Specifications
Materials of Construction | Cleanliness | Specifications | Options |
---|---|---|---|
316L stainless body |
Manufactured in Class 10 Cleanroom |
Leak tested using Mass spectrometer <1x10(-9) mbar.l/s |
Manual or pneumatic, LOTO failsafe configurations |
Elgiloy Diaphragm |
Zero particles @0.1µm |
<10Ra micro-inch surface roughness |
PFA / PI seat high temperature (up to 150C) |
Barstock-only source |
<10ppb O2/H20 outgassing |
Vacuum and pressure tested 100% production control |
4/20mA switching / signalling automation (pneumatic only) |
PCTFE standard seat (minimal volume) |
Cleaned using 18.2MΩ·cm DI water |
Manual 375p.s.i. Pneumatic 250p.s.i. |
0.41 - 9.0 Cv (flow coefficient) |