RG2 Series
UHP High Performance High and Low Pressure Regulators
Carten’s RG2 series ultra-high purity regulator is designed for high performance and precise control in point-of-use and high flow gas systems. Carten’s RG2 regulator provides high purity gas delivery and containment solutions for customers who demand precise pressure control in the semiconductor, photovoltaic, flat panel display, fibre-optics, LED and other high technology industries. All UHP regulators are assembled and tested in a class 10 cleanroom which support the final cleanliness and purity for Carten’s regulator range of products. The RG2 series is capable of precise control of gas pressure at or near the process tool for flow rates up to 600 SLPM at 300 PSIG inlet pressure. The
RG2 series regulator has a metal-to-metal diaphragm seal which provides enhanced leak tight integrity up to 1 x 10-9 atm cc/sec of Helium. The RG2 series is designed with three primary operating components: a loading mechanism, a sensing element, and a control element and these three components work together to accomplish pressure reduction through the regulator. Carten’s standard internal surface finish of 10Ra in contact with the wetted area enhances the surface quality to support high purity gas delivery to the point-of-use.
Applications for the RG2 series regulator include:
- Gas Cabinets
- Gas Chambers
- Gas Panels
- Gas Sticks
- High Performance Gas and Solvent Systems
