High-Purity Regulators
Carten’s RG1 and RG2 high-purity regulators are designed for pressure control. The RG series high-purity gas pressure regulators reduce high-pressure gas in a cylinder or process line to a lower, usable level as it passes to another piece of equipment. They also maintain pressure within a gas-delivery system.
Carten’s RG series is designed for high performance and precise control in point-of-use and medium-flow gas systems. The RG regulator provides high-purity gas delivery and containment solutions for customers who demand precise flow control in the semiconductor, photovoltaic, flat-panel display, fibre-optics, LED and other high-tech industries. All UHP regulators are assembled and tested in a class-10 cleanroom, which supports the final cleanliness and purity for the Carten regulator range of products.
The RG series is capable of precise gas pressure control at or near the process tool for flow rates up to 250 SLPM at 3000 PSIG inlet pressure. The RG series regulator has a metal-to-metal diaphragm seal, which provides enhanced leak-tight integrity up to 1 x 10-9 atm cc/sec of Helium. Carten’s standard internal surface finish of 10Ra in contact wetted area enhances the surface quality to support high-purity gas delivery to the point-of-use.
Primary applications include:
- Gas cabinets
- Gas chambers
- Gas panels
- Gas sticks
- High-performance gas and solvent systems
